説明
Tool Status: Online構成
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEMモデルの説明
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.ドキュメント
ドキュメントなし
BRUKER
D8 FABLINE
検証済み
カテゴリ
X-Ray / XRD / XRF
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105054
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
D8 FABLINE
カテゴリ
X-Ray / XRD / XRF
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105054
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Tool Status: Online構成
Process: XRD_Bruker Software Version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Chamber Components: Tool's Recipe Capability Multiple Recipe Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed BEOL,FEOL,HK,MOL,N2BEOEMモデルの説明
The D8 FABLINE provides fully automated handling of 300mm wafers . It provides a wide spectrum of techniques, such as rapid X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GID), and high-resolution X-ray diffraction (HR-XRD) in order to facilitate advanced process development and control on strained devices and high-K thin films, as well as materials characterization for future generation technology nodes.ドキュメント
ドキュメントなし