説明
We can refurbish (to the customers specifics) any of the Matrix System One tools (including 104, 105, 105CD, 106, 303, 205, 206). We offer multiple upgrades including the Zion Advanced User Interface with built in SECS/GEM. The HINE ATM-4 robot. Multiple other upgrades. We can configure these tools from 3"-6" (75-150mm).構成
構成なしOEMモデルの説明
The Matrix System One Model 105 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper that is set up for 4″ – 6″ wafers. It is configured for up to 6″ wafers and has independent control of pressure, RF power, temperature, gas flow, & substrate position. The Matrix 105 Asher has a 600W RF water-cooled generator and a multi-step program (three steps + over etch) process program. It also has a “Butterfly” Valve for more precise pressure control and a phase magnitude detector to provide real-time RF impedance matching control. The Matrix 105 Asher has two Mass Flow Controllers and a Vacuum Hose Assembly. The range for Strip is 150C to 250C +/-5C and the range for Descum is 70C to 150C +/-5C. It also has a Wafer Lift Pin Assembly (up and down).ドキュメント
同様のリスト
すべて表示
MATRIX
105
カテゴリ
Ashers / Plasma Cleaner
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
125985
ウェーハサイズ：
3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available