説明
説明なし構成
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEMモデルの説明
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8ドキュメント
ドキュメントなし
同様のリスト
すべて表示
HITACHI
S-8820
カテゴリ
CD-SEM
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
133570
ウェーハサイズ：
不明
ヴィンテージ：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEMモデルの説明
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8ドキュメント
ドキュメントなし