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説明
CMP構成
2 chamberOEMモデルの説明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.ドキュメント
ドキュメントなし
同様のリスト
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EBARA
F-REX300
カテゴリ
CMP
最終検証： 21日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123630
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
CMP構成
2 chamberOEMモデルの説明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.ドキュメント
ドキュメントなし