説明
Spin coating system with spray coating capability Not used since refurbishment構成
EVG 101 Advanced Spin Coating System consisting of: - MODEL EVG 101 - Semi-Automatic, with Manual loading - Suitable for wafer sizes 3" - 8" wafers (with proper chuck) - Currently configured for 4" & 6" wafers - One Coat Module - Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, drain or dump container, and exhaust lines - Manual loading and mechanical pre-aligner (pneumatically actuated) - PC controlled with windows based graphical user interface - Password protected access levels - Coat chamber PTFE for Spin Coating - Programmable rotation speed for substrate - Programmable arm for resist dispense and topside EBR - One Cybor Pump - Syringe dispense option included - External Chemical cabinet with two solvents - Previously used chemistry: 1813, 1827, acetone and IPA - Operators Manual and Documentation included Upgrade Chamber to Spray Coating CapabilityOEMモデルの説明
EVG 101 Advanced Resist Processing System The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured wafers for interconnection techniques with EVG’s advanced OmniSpray coating technology. This ensures low material consumption of precious high-viscosity photoresists or polymers while improving uniformity and resist spreading options.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105026
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
EVGroup (EVG)
EVG101
カテゴリ
Coaters & Developers
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
105026
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Spin coating system with spray coating capability Not used since refurbishment構成
EVG 101 Advanced Spin Coating System consisting of: - MODEL EVG 101 - Semi-Automatic, with Manual loading - Suitable for wafer sizes 3" - 8" wafers (with proper chuck) - Currently configured for 4" & 6" wafers - One Coat Module - Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, drain or dump container, and exhaust lines - Manual loading and mechanical pre-aligner (pneumatically actuated) - PC controlled with windows based graphical user interface - Password protected access levels - Coat chamber PTFE for Spin Coating - Programmable rotation speed for substrate - Programmable arm for resist dispense and topside EBR - One Cybor Pump - Syringe dispense option included - External Chemical cabinet with two solvents - Previously used chemistry: 1813, 1827, acetone and IPA - Operators Manual and Documentation included Upgrade Chamber to Spray Coating CapabilityOEMモデルの説明
EVG 101 Advanced Resist Processing System The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured wafers for interconnection techniques with EVG’s advanced OmniSpray coating technology. This ensures low material consumption of precious high-viscosity photoresists or polymers while improving uniformity and resist spreading options.ドキュメント
ドキュメントなし