説明
説明なし構成
構成なしOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Palletized
製品ID：
142451
ウェーハサイズ：
12"/300mm
Components:
2C + 2D
HDD / Software:
No
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ACT 12
カテゴリ
Coaters & Developers
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Palletized
製品ID：
142451
ウェーハサイズ：
12"/300mm
Components:
2C + 2D
HDD / Software:
No
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
構成なしOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
ドキュメントなし