説明
説明なし構成
Direction: RIGHT HAND SIDE 4 Blocks Interfaced; Cassette, 2 Process, & Stepper Interface 4 Wafer Transfer Robot Arms; Cassette, 2 Process, & Stepper Interface Control Module on cassette end station (CES) 3 Station 25 wafer FOUP Interface is to Ultratech T-300 Cassette rotators and platforms Facility sensors for DI water and Caustic exhaust Coater (COT) - quantity 1 Coater (PCT) - quantity 2 2 Nozzles w/ Temperature Control Chuck vacuum sensor Millipore P-250 pumps SS 0.3mm diameter side rinse nozzle w/ flow meter 1 set of 2 SS 0.3mm diameter back rinse nozzles 1 SS 0.3mm diameter back rinse nozzle for chemical 1 1 SS 0.3mm diameter back rinse nozzle for chemical 2 Bulk-FSI system for side and back rinse PTI mass flow controller per module PP cup w/ sensor Chuck Up VAC Off Switch Addition of drip traysOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
TEL / TOKYO ELECTRON
ACT 12
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
100270
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ACT 12
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
100270
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available