説明
Coater & Developer構成
Details Attached 120 WPH Single Block Slam Stand Alone Track (QTY 2) Wafer Transfer Robot Arms: 1 Carrier, 1 Process (QTY 3) FOUP Loader Port SECS/GEM I/II Interface required is iUSC (QTY 2) SOG Coater Process Station (QTY 2) SOG Nozzles w/ Temperature Control (QTY 4) Solvent Capability TARC Compatible: Teflon Coated Chamber PTI Mass Flow Exhaust Controller Temperature Humidity Control 1 Set of SS Back Rinse and Cup Rinse Nozzles (QTY 4) Chill Plate Process Station Transfer Chill Plate Process Station (QTY 3) Transfer Low Temperature Hot Plate (LHP) (QTY 6) High Temp Hot Plate Process Stations (HHP) TEL Temperature and Humidity Controller Side Chemical Cabinet (QTY 8) – 2.5 L Bottle Storage Capacity (QTY 4) – 2.5 L Bottle Storage Capacity (QTY 4) – 12 L Tank Solvent Canisters AC Power BoxOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
カテゴリ
Coaters & Developers
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
157398
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ACT 12
カテゴリ
Coaters & Developers
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
157398
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available