説明
Coater/developer parts tool構成
Known issues: No hot plate Chemical box 3-port loader Type 4 main controller / spin driver PCB PRB with (Qty 2) coaters SMC INR-244-244U-240 temperature control unit Power rack (Qty 2) AC power boxes: 50 A / 150 AOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
157494
ウェーハサイズ：
不明
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ACT 12
カテゴリ
Coaters & Developers
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
157494
ウェーハサイズ：
不明
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Coater/developer parts tool構成
Known issues: No hot plate Chemical box 3-port loader Type 4 main controller / spin driver PCB PRB with (Qty 2) coaters SMC INR-244-244U-240 temperature control unit Power rack (Qty 2) AC power boxes: 50 A / 150 AOEMモデルの説明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.ドキュメント
ドキュメントなし