説明
説明なし構成
Configuration : 4C3D + 1Tarc Unit Main Controller Typ has one HDD. Equipment is on standby since May 2025 ( not in production line) The central media supply is still connected, resistors are uninstalled, resist pumps are under solvent. The system is complete with all parts.OEMモデルの説明
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.ドキュメント
ドキュメントなし
カテゴリ
Coaters & Developers
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
128764
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
TEL / TOKYO ELECTRON
ACT 8
カテゴリ
Coaters & Developers
最終検証： 昨日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
128764
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Configuration : 4C3D + 1Tarc Unit Main Controller Typ has one HDD. Equipment is on standby since May 2025 ( not in production line) The central media supply is still connected, resistors are uninstalled, resist pumps are under solvent. The system is complete with all parts.OEMモデルの説明
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.ドキュメント
ドキュメントなし