説明
TEL ACT8 Single COT/DEV構成
2C2D, L->R, #2 Main Controller, Open Cassette, Inline type, 4 Open Cassette, RRC Pump, E2 Nozzle, ADH×1、TRS×3、CPL×3、LHP×6、CWH×1、WEE×1OEMモデルの説明
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.ドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
ACT 8
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112924
ウェーハサイズ：
不明
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ACT 8
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112924
ウェーハサイズ：
不明
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
TEL ACT8 Single COT/DEV構成
2C2D, L->R, #2 Main Controller, Open Cassette, Inline type, 4 Open Cassette, RRC Pump, E2 Nozzle, ADH×1、TRS×3、CPL×3、LHP×6、CWH×1、WEE×1OEMモデルの説明
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.ドキュメント
ドキュメントなし