説明
Coater Developer Working condition before de-install No missing parts, but Without HDD構成
1. DESCRIPTION 1-1. Left to Right 1-2. Model : Clean track ACT-8 (2C2D) 1-3. WAFER & CARRIER TYPE : 4foup 1-4. System Power Rating : AC 200/220V , 3-Phase for System 1-5. Software Version : #2 2. Main system (2-1, 2-2) 1) Main frame with system controller 2) 4 FOUP SYSTEM - Type : Normal Cassette Type 3) Coater unit - 4 dispense nozzle with temperature controlled lines - RRC pump 4NOZZLE - Rinse nozzle : back /EBR / solvent bath for etch unit - Rinse system : 3 liter 2Tank Buffer tank system 2set - Degas System : Installed - Programmable side rinse - Direct drain type 4) Developer unit (3-1 , 3-2) - RRC nozzle (1ea) for each unit - Dev solution l : 3 liter 2Tank Buffer tank system 2 set - Degas System : Installed - Developer temperature control system - Direct Drain 5) Adhesion Unit (ADH) 1ea 6) Low Temp Hot Plates (LHP)6ea 7) Cup Washer Holder (CWH) 1ea 8) High Presision Hot Plates ( PHP) 3eaOEMモデルの説明
CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.ドキュメント
TEL / TOKYO ELECTRON
ACT 8
検証済み
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
106309
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ACT 8
カテゴリ
Coaters & Developers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
106309
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available