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eV300
概要（Overview）
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.
現在の掲載品
4
サービス
検査、保証、鑑定、ロジスティクス
