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説明
Frame構成
構成なしOEMモデルの説明
The eV300 defect review system, an advanced, automated SEM designed to gather defect excursion information, analyze and report the results with the improved sensitivity required at smaller design rules. The eV300 supplements optical review by providing topographical information, enabling more accurate defect classification than can be achieved by optical review systems alone.ドキュメント
KLA
eV300
カテゴリ
Defect Inspection
最終検証： 30日以上前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
不明
製品ID：
124111
ウェーハサイズ：
不明
ヴィンテージ：
不明
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