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説明
De-installed構成
-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unitOEMモデルの説明
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.ドキュメント
検証済み
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
102947
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA
SURFSCAN 6420
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
102947
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available