説明
Metrology / inspection system構成
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEMモデルの説明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.ドキュメント
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KLA
2367
カテゴリ
Defect Inspection
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154831
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Metrology / inspection system構成
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEMモデルの説明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.ドキュメント
ドキュメントなし