説明
Darkfield inspection構成
構成なしOEMモデルの説明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.ドキュメント
ドキュメントなし
KLA
AIT UV
検証済み
カテゴリ
Defect Inspection
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112936
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA
AIT UV
カテゴリ
Defect Inspection
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
112936
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Darkfield inspection構成
構成なしOEMモデルの説明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.ドキュメント
ドキュメントなし