説明
説明なし構成
Dark Field Defect InspectionOEMモデルの説明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.ドキュメント
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KLA
AIT UV
カテゴリ
Defect Inspection
最終検証： 2日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
87797
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Dark Field Defect InspectionOEMモデルの説明
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.ドキュメント
ドキュメントなし