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説明
Wafer Defect Inspection System Open Cassette: 2 Option: Narrow & Wide Body Missing parts: No Missing Parts Initialization Failure: 1. DSP error during initializing 2. Analog Dark Field Node Reset Alarm during initializing 3. Error, One of the LON nodes has been reset during initializing構成
構成なしOEMモデルの説明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.ドキュメント
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KLA
SP1-TBI
カテゴリ
Defect Inspection
最終検証： 5日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
126167
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
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