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説明
With dual SMIF handler. Condition: working condition Current Tool Use: Optical Alignment, plan docking with open cassette handler for test構成
構成なしOEMモデルの説明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.ドキュメント
ドキュメントなし
同様のリスト
すべて表示
KLA
SP1-TBI
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
105091
ウェーハサイズ：
不明
ヴィンテージ：
2006
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説明
With dual SMIF handler. Condition: working condition Current Tool Use: Optical Alignment, plan docking with open cassette handler for test構成
構成なしOEMモデルの説明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.ドキュメント
ドキュメントなし