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説明
Copper only構成
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEMモデルの説明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.ドキュメント
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KLA
SP1-TBI
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
78031
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
不明
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説明
Copper only構成
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEMモデルの説明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.ドキュメント
ドキュメントなし