説明
Defect Review Vacuum tool構成
Main System Active damping subsystem 1 OK Handler System NA Factory Interface SMIF 2 OK Factory Interface SMIF 2 OKOEMモデルの説明
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.ドキュメント
ドキュメントなし
KLA
eDR-7100
検証済み
カテゴリ
Defect Inspection
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
95269
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
eDR-7100
検証済み
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
95269
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Defect Review Vacuum tool構成
Main System Active damping subsystem 1 OK Handler System NA Factory Interface SMIF 2 OK Factory Interface SMIF 2 OKOEMモデルの説明
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.ドキュメント
ドキュメントなし