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説明
METROLOGY構成
構成なしOEMモデルの説明
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.ドキュメント
ドキュメントなし
KLA
eDR-7100
カテゴリ
Defect Inspection
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123639
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
METROLOGY構成
構成なしOEMモデルの説明
The eDR-7100, an electron-beam wafer defect review and classification system that utilizes a fourth-generation immersion column and an advanced stage to quickly and accurately re-locate, image and classify yield-critical defects.ドキュメント
ドキュメントなし