説明

DPS plasma etch system Details Attached

構成

Does not include: Pumps, chillers, abatement, HP robot, endpoint unit Process: DPS Fab section: Etch Software version: E4826 CIM: SECS/GEM Main system: PDU/AC rack VME controller system Centura platform (Qty 2) DPS etch chambers Factory interface: (Qty 2) Open cassettes Handler system: HP robot: None On-the-fly sensor: Installed (Qty 2) Tilt-out cassettes

OEMモデルの説明

The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.