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APPLIED MATERIALS (AMAT) P5000 ETCH
    説明
    Chamber A MERIE RIE w/endpoint 100mm Chamber B MERIE RIE w/endpoint 100mm Chamber D CVD SiO2, SiON, SiN 100mm
    構成
    Chamber A: -Needs a turbo -Needs an etch kit -Assembly Chamber Bravo: -Same as A Chamber D: -Vacuum leak
    OEMモデルの説明
    The AMAT P5000 Etch is a magnetically enhanced reactive ion etching system (MERIE) with two functional process chambers (Chambers B & C). P5000 Chamber B is primarily used for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.) and some carbon based compounds (resist, poly imide, etc) while chamber C is mainly used for silicon etching with high selectivity to underlying dielectric such as silicon dioxide. The system can process only 4" wafers. Pieces have to be attached to a 4" wafer. Though the process chamber processes one wafer at a time, up to 25 wafers can be loaded per batch.
    ドキュメント

    ドキュメントなし

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    verified-listing-icon

    検証済み

    カテゴリ
    Dry / Plasma Etch

    最終検証: 60日以上前

    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    87010


    ウェーハサイズ:

    4"/100mm, 6"/150mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    同様のリスト
    すべて表示
    APPLIED MATERIALS (AMAT) P5000 ETCH

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    Dry / Plasma Etch
    ヴィンテージ: 1995状態: 中古
    最終確認60日以上前

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    verified-listing-icon
    検証済み
    カテゴリ
    Dry / Plasma Etch
    最終検証: 60日以上前
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    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    87010


    ウェーハサイズ:

    4"/100mm, 6"/150mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    Chamber A MERIE RIE w/endpoint 100mm Chamber B MERIE RIE w/endpoint 100mm Chamber D CVD SiO2, SiON, SiN 100mm
    構成
    Chamber A: -Needs a turbo -Needs an etch kit -Assembly Chamber Bravo: -Same as A Chamber D: -Vacuum leak
    OEMモデルの説明
    The AMAT P5000 Etch is a magnetically enhanced reactive ion etching system (MERIE) with two functional process chambers (Chambers B & C). P5000 Chamber B is primarily used for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.) and some carbon based compounds (resist, poly imide, etc) while chamber C is mainly used for silicon etching with high selectivity to underlying dielectric such as silicon dioxide. The system can process only 4" wafers. Pieces have to be attached to a 4" wafer. Though the process chamber processes one wafer at a time, up to 25 wafers can be loaded per batch.
    ドキュメント

    ドキュメントなし

    同様のリスト
    すべて表示
    APPLIED MATERIALS (AMAT) P5000 ETCH

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    Dry / Plasma Etchヴィンテージ: 1995状態: 中古最終検証:60日以上前
    APPLIED MATERIALS (AMAT) P5000 ETCH

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    Dry / Plasma Etchヴィンテージ: 1996状態: 中古最終検証:60日以上前
    APPLIED MATERIALS (AMAT) P5000 ETCH

    APPLIED MATERIALS (AMAT)

    P5000 ETCH

    Dry / Plasma Etchヴィンテージ: 0状態: 中古最終検証:60日以上前