説明
Single Wafer Processing構成
構成なしOEMモデルの説明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionドキュメント
ドキュメントなし
KLA / SPTS
PRIMAXX MONARCH 25
検証済み
カテゴリ
Dry / Plasma Etch
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117907
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
カテゴリ
Dry / Plasma Etch
最終検証： 16日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
117907
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Single Wafer Processing構成
構成なしOEMモデルの説明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionドキュメント
ドキュメントなし