説明
High-speed EPI It was fully refurbished in 2024. Installed and running.構成
AMAT Centura EPI Pronto 480V Pure System (eliminates the 480/220 step down xformer footprint) Size Capability: 4", 5", 6", 8" (we have 6" and 8" kits inhouse) Capable of ATM or RP: Setup for ATM currently 3 Process chambers 1 single wafer cooldown chamber Upper dome temp closed loop control system (designed to eliminate process issues like angel hair and other dome coating) Mesh perforated susceptors Process chamber wafer lift type: motorized (not pneumatic like older Centura, eliminates wafer sliding/wafer to susceptor bridging) Cooldown lift pneumatic actuator: modified direct style Piezocon system TCS delivery onboard Direct dopant inject capable All MFCs HoribaStec Widebody/Rotating Loadlock indexers option Fast wafer mapping upgrade installed Cassette type: Empak 25 XT202 Thickness Controller: inner/outer dual MFC controller upgrade (not BMV, Flowpoint like older models) On The Fly (OTF) centerfinder installed (not remote centerfinder) VITA controller Edwards iQDP40 with external controller upgrade (non turbo) 50-foot controller to mainframe cablesOEMモデルの説明
The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.ドキュメント
ドキュメントなし
カテゴリ
Epitaxial deposition (EPI)
最終検証： 19日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
Installed / Running
製品ID：
146906
ウェーハサイズ：
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
CENTURA EPI
カテゴリ
Epitaxial deposition (EPI)
最終検証： 19日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
Installed / Running
製品ID：
146906
ウェーハサイズ：
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
High-speed EPI It was fully refurbished in 2024. Installed and running.構成
AMAT Centura EPI Pronto 480V Pure System (eliminates the 480/220 step down xformer footprint) Size Capability: 4", 5", 6", 8" (we have 6" and 8" kits inhouse) Capable of ATM or RP: Setup for ATM currently 3 Process chambers 1 single wafer cooldown chamber Upper dome temp closed loop control system (designed to eliminate process issues like angel hair and other dome coating) Mesh perforated susceptors Process chamber wafer lift type: motorized (not pneumatic like older Centura, eliminates wafer sliding/wafer to susceptor bridging) Cooldown lift pneumatic actuator: modified direct style Piezocon system TCS delivery onboard Direct dopant inject capable All MFCs HoribaStec Widebody/Rotating Loadlock indexers option Fast wafer mapping upgrade installed Cassette type: Empak 25 XT202 Thickness Controller: inner/outer dual MFC controller upgrade (not BMV, Flowpoint like older models) On The Fly (OTF) centerfinder installed (not remote centerfinder) VITA controller Edwards iQDP40 with external controller upgrade (non turbo) 50-foot controller to mainframe cablesOEMモデルの説明
The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.ドキュメント
ドキュメントなし