説明

AMAT Centura Pronto Epi Refurbished, never installed or used

構成

AMAT Centura Pronto Epi 3 chambers 150mm - The owner planned to use it as a 200mm system, so it does have the universal loadlock platform for both diameters. If you wanted to convert it to 200mm, the robot blade and chamber susceptor, lift shaft, and pins would need to be changed out.

OEMモデルの説明

The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.