説明
Process: PR Strip 1. System Configuration: Main System Load Port: Brooks Fixload TM V6 EFEM Robot: 02-169208-00 Aligner: Yaskawa RF Rack: Generator ENI GHW-50A-04 5ea UI Panel Light Curtain: KEYENCE Signal Cable (RF Cable Included) 2. Process Chamber Configuration: GXT type (Upgrade Bell jar and Quartz tube) EPD: 4ea(#2,#3,#4,#5 Port) RF Matcher: CPMX-3000 5ea RF Source: 02-352103-00 5ea Load/Unload Port HDIS Pedestal: #2, #3, #,1, #6 Fixed Pedestal: #4, #5 Stage #1: Preheat Yaskawa Spindle Athenta Computer UI Computer Gate Valve: MDC ISO Valve Throttle Valve: NC Slit Valve: V-TEX Manometer: MKS 10 Torr Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4構成
構成なしOEMモデルの説明
The GAMMA 2130 system is a front-end-of-line (FEOL) photoresist strip system for 300mm wafers. Our multi-station sequential processing architecture incorporates six stations within a single process chamber, enabling a 30 percent higher throughput rate when compared to that of the closest competitor.ドキュメント
ドキュメントなし
LAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2130
検証済み
カテゴリ
Ashers / Plasma Cleaner
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
81932
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH / NOVELLUS / GASONICS
GAMMA 2130
カテゴリ
Ashers / Plasma Cleaner
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
81932
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Process: PR Strip 1. System Configuration: Main System Load Port: Brooks Fixload TM V6 EFEM Robot: 02-169208-00 Aligner: Yaskawa RF Rack: Generator ENI GHW-50A-04 5ea UI Panel Light Curtain: KEYENCE Signal Cable (RF Cable Included) 2. Process Chamber Configuration: GXT type (Upgrade Bell jar and Quartz tube) EPD: 4ea(#2,#3,#4,#5 Port) RF Matcher: CPMX-3000 5ea RF Source: 02-352103-00 5ea Load/Unload Port HDIS Pedestal: #2, #3, #,1, #6 Fixed Pedestal: #4, #5 Stage #1: Preheat Yaskawa Spindle Athenta Computer UI Computer Gate Valve: MDC ISO Valve Throttle Valve: NC Slit Valve: V-TEX Manometer: MKS 10 Torr Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4構成
構成なしOEMモデルの説明
The GAMMA 2130 system is a front-end-of-line (FEOL) photoresist strip system for 300mm wafers. Our multi-station sequential processing architecture incorporates six stations within a single process chamber, enabling a 30 percent higher throughput rate when compared to that of the closest competitor.ドキュメント
ドキュメントなし