説明
219 x 105 x 86 IN - 5200 LBS構成
Voltage:480 VOLTS480 VOLTS Frequency:60 HERTZ60 HERTZ Phase:33 Current:30 AMPS30 AMPSOEMモデルの説明
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.ドキュメント
ドキュメントなし
THERMCO
5200
検証済み
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
44873
ウェーハサイズ：
不明
ヴィンテージ：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
THERMCO
5200
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
44873
ウェーハサイズ：
不明
ヴィンテージ：
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
219 x 105 x 86 IN - 5200 LBS構成
Voltage:480 VOLTS480 VOLTS Frequency:60 HERTZ60 HERTZ Phase:33 Current:30 AMPS30 AMPSOEMモデルの説明
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.ドキュメント
ドキュメントなし