説明
Metrology / inspection system構成
Main Unit (Qty 2) SMIF Factory Interface Robot Unit Process: OVERLAY MEASUREMENT CIM: SECSOEMモデルの説明
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.ドキュメント
ドキュメントなし
検証済み
カテゴリ
Overlay
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154815
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ARCHER 10 XT
カテゴリ
Overlay
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154815
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Metrology / inspection system構成
Main Unit (Qty 2) SMIF Factory Interface Robot Unit Process: OVERLAY MEASUREMENT CIM: SECSOEMモデルの説明
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.ドキュメント
ドキュメントなし