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OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
  • OXFORD PLASMALAB 133
説明
説明なし
構成
Voltage:208 VOLTS208 VOLTS Frequency:50/60 HERTZ50/60 HERTZ Phase:33 Current:26 AMPS26 AMPS Dimensions: StandardMetric Overall:52 x 22 x 49 IN - 500 LBS1320.80 x 558.80 x 1244.60 mm - 226.80 kg
OEMモデルの説明
The Oxford Plasmalab 133 is a system used for plasma etching through a process called Reactive Ion Etching (RIE). This refurbished system is designed for GaN etching and has a platen that measures 330mm. It has an RF power of 600W at a frequency of 13.56MHz and features a water-cooled electrode that can operate within a temperature range of 10°C to 80°C. The system also includes a load lock with a turbo pump and an end-point detection system that utilizes Verity Optical emission spectroscopy within the range of 200-800nm. The gas pod of the system has six lines, including mass flow controllers for gases such as Ar, CL, BCL3, and N2O.
ドキュメント

ドキュメントなし

カテゴリ
PECVD

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

41123


ウェーハサイズ:

不明


ヴィンテージ:

不明


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

OXFORD

PLASMALAB 133

verified-listing-icon
検証済み
カテゴリ
PECVD
最終検証: 60日以上前
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/39d83ca59f3c4645a9c47fc8324cf096_209129104a7a41578d91a249e5cf7ffc1201a_mw.jpeg
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/56c92079b1934c008fa1d385260e8023_629157d5226449ba80acfcc60ef464091201a_mw.jpeg
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/529673e8ad90413f835a584a4db69224_fa5e92c85a6d4b069bf85eb2ac652aa51201a_mw.jpeg
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/c909785727b04d9287f5f406320f27be_2c569a1f6dd5425da0f768777487d2bd1105c_mw.jpeg
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/990a72549a444b49a25010829c14d5bd_1cef2f9565834061a0ebce6cc05905be1105c_mw.jpeg
listing-photo-cc7c7dd596dc42baa27417d92d1b4220-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45092/cc7c7dd596dc42baa27417d92d1b4220/d3f1f077d13a4b03aa8d1372902e943d_7d2052e221b74c8c9733a01fa702665b1105c_mw.jpeg
主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

41123


ウェーハサイズ:

不明


ヴィンテージ:

不明


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし
構成
Voltage:208 VOLTS208 VOLTS Frequency:50/60 HERTZ50/60 HERTZ Phase:33 Current:26 AMPS26 AMPS Dimensions: StandardMetric Overall:52 x 22 x 49 IN - 500 LBS1320.80 x 558.80 x 1244.60 mm - 226.80 kg
OEMモデルの説明
The Oxford Plasmalab 133 is a system used for plasma etching through a process called Reactive Ion Etching (RIE). This refurbished system is designed for GaN etching and has a platen that measures 330mm. It has an RF power of 600W at a frequency of 13.56MHz and features a water-cooled electrode that can operate within a temperature range of 10°C to 80°C. The system also includes a load lock with a turbo pump and an end-point detection system that utilizes Verity Optical emission spectroscopy within the range of 200-800nm. The gas pod of the system has six lines, including mass flow controllers for gases such as Ar, CL, BCL3, and N2O.
ドキュメント

ドキュメントなし