説明

The Tencor P-1 Long Scan Profiler is a computerized, high-sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. It features the ability to measure micro-roughness with 1 Å resolution over short distances as well as waviness over a full, 210-mm (8.2-in) scan. The built-in PC/AT computing power offers precise, automatic measurement capability, data storage, and data analysis. The Tencor P-1 can profile a variety of materials, including magnetic disks, semiconductor wafers, precision-machined and polished surfaces, ceramics for micro-electronics, glass for flat panel displays and optical surfaces

構成

構成なし

OEMモデルの説明

The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch. The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.