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Configuration Requirement Original temperature: 23° Original Altitude normal pressure: 755mmHg Lens type: Nikon standard Rack type: Right Type Wafer Carrier Table: Left Reticle Library: Center Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 Pellicle reticle loader (PRL) YES System for 6” reticle 6 Inch (NON-SMIF) 25mm X 33mm field size YES LSA system YES FIA l//system YES Illumination model: (Conventional, Annular,) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch Pellicle reticle detector YES BMU Type Standard Pre-alignment non contact pre-alignment Non Contact Chip leveling YES NEMA Box YES Tool software MCSV : 3.44 Laser Type Giga Photon Chamber Type Asahi N5Z1102 (2000.02)OEMモデルの説明
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.ドキュメント
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NIKON
NSR-S204B
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
118460
ウェーハサイズ：
不明
ヴィンテージ：
不明
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