概要（Overview）

The NanoSpec 9100 is an advanced film analysis system that combines DUV-NIR spectroscopic ellipsometry and DUV-visible spectroscopic reflectometry. It can handle 75mm to 200mm wafers and is equipped with N2000, the first metrology software that meets the SEMI user interface standard E95-0200. The system is designed for optical-telecom and wireless device manufacturing and can handle advanced materials and processes with speed and precision.