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説明
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.構成
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEMモデルの説明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.ドキュメント
ドキュメントなし
AKRION
GAMA
カテゴリ
Wet Benches - Auto
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Uncrated
製品ID：
39987
ウェーハサイズ：
不明
ヴィンテージ：
2007
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説明
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.構成
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEMモデルの説明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.ドキュメント
ドキュメントなし