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説明
Solvent構成
ST28, PSR, QDR, SDOEMモデルの説明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.ドキュメント
ドキュメントなし
AKRION
GAMA
カテゴリ
Wet Benches - Auto
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
18171
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1999
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説明
Solvent構成
ST28, PSR, QDR, SDOEMモデルの説明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.ドキュメント
ドキュメントなし