説明
Post CMW Scrubber構成
Dual brush and top side brush chambers, spin dry Gas - 1:100 DHF, 1:100 NH4OH PROGRESS TYPE: WET/ CMP COMPONENT : MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR AC TRANSFOMER FA-21000A PC SGD DRIVE_YASKAWA HF CIRCULATION FILTER UT3-F3AE-B TOUCH PANEL HFC-VWE HITACHI INVERTER RORZE CURT-2032-0 SLURRY FLOW CONTROLLER INTERFACE/ POWER BOX IFC-7300-001 DISTRIBUTION BOXOEMモデルの説明
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.ドキュメント
ドキュメントなし
カテゴリ
Wet Benches - Auto
最終検証: 15日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
119533
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示SCREEN / DNS / DAINIPPON SCREEN
AS-2000
カテゴリ
Wet Benches - Auto
最終検証: 15日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
119533
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Post CMW Scrubber構成
Dual brush and top side brush chambers, spin dry Gas - 1:100 DHF, 1:100 NH4OH PROGRESS TYPE: WET/ CMP COMPONENT : MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR AC TRANSFOMER FA-21000A PC SGD DRIVE_YASKAWA HF CIRCULATION FILTER UT3-F3AE-B TOUCH PANEL HFC-VWE HITACHI INVERTER RORZE CURT-2032-0 SLURRY FLOW CONTROLLER INTERFACE/ POWER BOX IFC-7300-001 DISTRIBUTION BOXOEMモデルの説明
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.ドキュメント
ドキュメントなし