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0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
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KLA
SP1 DLS
カテゴリ
Defect Inspection
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123843
ウェーハサイズ：
不明
ヴィンテージ：
2004
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説明
説明なし構成
0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
ドキュメントなし