説明
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY Coordinates構成
構成なしOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
ドキュメントなし
同様のリスト
すべて表示
KLA
SP1 DLS
カテゴリ
Defect Inspection
最終検証： 7日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
138242
ウェーハサイズ：
不明
ヴィンテージ：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY Coordinates構成
構成なしOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
ドキュメントなし