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説明
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Dual FIMS Handler onlyOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
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KLA
SP1 DLS
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
不明
製品ID：
69099
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
説明なし構成
Dual FIMS Handler onlyOEMモデルの説明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.ドキュメント
ドキュメントなし