説明

説明なし

構成

KLA-TENCOR SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of: - Model: SP1 TBI - Brooks Single 200/300mm FOUP - Unpatterned Surface Inspection System - Wafer Measurement Module - Triple Beam Illumination (TBI) - Normal Illumination- 0.079 Defect Sensitivity - Oblique Illumination- 0.060 Defect Sensitivity - Includes DB Enhancement Option - Includes GEM/SECS (Comm Port) Option - Includes GEM/SECS (HSMS) Option - Includes XY Coordinates Option - Blower Box

OEMモデルの説明

The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.

ドキュメント

ドキュメントなし

KLA

SP1-TBI

検証済み

カテゴリ

Defect Inspection

最終検証： 4日前

主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

138247

ウェーハサイズ：

不明

ヴィンテージ：

2009

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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