説明
HDD included New laser Unpatterned Wafer Surface Inspection System構成
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEMモデルの説明
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.ドキュメント
ドキュメントなし
KLA
SURFSCAN SP2
検証済み
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
108659
ウェーハサイズ：
不明
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA
SURFSCAN SP2
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
108659
ウェーハサイズ：
不明
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
HDD included New laser Unpatterned Wafer Surface Inspection System構成
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEMモデルの説明
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.ドキュメント
ドキュメントなし