説明
Wafer metrology system構成
Known issues: Power-supply rack reported defective. Configuration: Mainframe Included spares: (Qty 2) Newport MM3000 motion controllers DSP lock-in amplifier PRI ESC-212 robot controller SDI hot-chuck temperature box SDI Fe activation controller box PRI ATM-105-1-S robot PDM-40a and PDM-60V voltmeters Wavetek model 29 function generator Brooks PRE-200 aligner (Qty 2) Bertan 2341-1 power supplies Manuals, miscellaneous small parts and cablesOEMモデルの説明
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.ドキュメント
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SEMILAB
FAAST 230
カテゴリ
Defect Inspection
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
113163
ウェーハサイズ：
不明
ヴィンテージ：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Wafer metrology system構成
Known issues: Power-supply rack reported defective. Configuration: Mainframe Included spares: (Qty 2) Newport MM3000 motion controllers DSP lock-in amplifier PRI ESC-212 robot controller SDI hot-chuck temperature box SDI Fe activation controller box PRI ATM-105-1-S robot PDM-40a and PDM-60V voltmeters Wavetek model 29 function generator Brooks PRE-200 aligner (Qty 2) Bertan 2341-1 power supplies Manuals, miscellaneous small parts and cablesOEMモデルの説明
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.ドキュメント
ドキュメントなし