説明
説明なし構成
Details Attached System: System controller Board no missing Loadlock Widebody ENP 0240-70932 / 0240-70933 No Process Kit (Quartz part, Robot blade, Graphite process kit) include No 208V External transformer includ EPI Variable speed blower (#A,B,C) Dop1 N2 860cc Brooks / Dop2 H2 500cc UFC8100 H2 Main → N2 20L UFC1660 / H2 20L UFC1661 Chamber A: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber B: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber C: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part BoxOEMモデルの説明
The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.ドキュメント
カテゴリ
Epitaxial deposition (EPI)
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
155986
ウェーハサイズ：
不明
ヴィンテージ：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
CENTURA EPI
カテゴリ
Epitaxial deposition (EPI)
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
155986
ウェーハサイズ：
不明
ヴィンテージ：
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available