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STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
  • STS MULTIPLEX ICP
説明
説明なし
構成
Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Process = ASE (Advanced Silicon Etch, Bosch Process) Wafer Size = 150mm Loader capacity = 2 wafer Carousel Chuck Type = Mechanical Weighted Clamp Process Gases: C4F8 = 300 Sccms SFG = 600 Sccms O2 = 100 Sccms AR = 100 Sccms Turbo Pump = Leybold Mag 2000 CT RF Generator 1 = ENI ACG-3 RF Generator 2 = AE RFG 3001 (Advanced Energy) Vacuum measurement = MKS Instruments Gate Valve = VAT Throttling Gate Valve Slit Valve = Vat Slit Valve Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue Vacuum Pump Loadlock = Edwards Pump E2M40 Vacuum Pump Process Module = Edwards IQDP80 w/IQDB250 Blower (intelligent Interface) Chiller = Affinity, PWG-060K-BE33CBC2
OEMモデルの説明
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
ドキュメント

ドキュメントなし

verified-listing-icon

検証済み

カテゴリ
Dry / Plasma Etch

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

64816


ウェーハサイズ:

6"/150mm


ヴィンテージ:

2001


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

STS

MULTIPLEX ICP

verified-listing-icon
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
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主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

64816


ウェーハサイズ:

6"/150mm


ヴィンテージ:

2001


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし
構成
Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch) Description of Process = ASE (Advanced Silicon Etch, Bosch Process) Wafer Size = 150mm Loader capacity = 2 wafer Carousel Chuck Type = Mechanical Weighted Clamp Process Gases: C4F8 = 300 Sccms SFG = 600 Sccms O2 = 100 Sccms AR = 100 Sccms Turbo Pump = Leybold Mag 2000 CT RF Generator 1 = ENI ACG-3 RF Generator 2 = AE RFG 3001 (Advanced Energy) Vacuum measurement = MKS Instruments Gate Valve = VAT Throttling Gate Valve Slit Valve = Vat Slit Valve Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue Vacuum Pump Loadlock = Edwards Pump E2M40 Vacuum Pump Process Module = Edwards IQDP80 w/IQDB250 Blower (intelligent Interface) Chiller = Affinity, PWG-060K-BE33CBC2
OEMモデルの説明
The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
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