説明
説明なし構成
Process D-poly and U-poly -General Configuration Process TOBIN Tool Mode ALPHA-3031-K Process Pressure 2666Pa Process Temprature 750C Boat Opration 2 Boats Type Carrier I/D Reader/Writer Read (at Load Port ) Write (at Load Port) (OP) Maker /Model ASYST / ATR9100 -Furnace Unit Heater Type Mid-Temp. VMM-56-002 5zone / 500-1000(c) T/C for Over temperature Protection KIT,CHAMBER O.H.SNSR Temperature Controller MA901-8FK09-Z250A -Wafer / Carrier Handing Wafer Type 300 SEMI STD-Notch Wafer Notch Aligner Not Installed (STD) Carrier Type FOUP / 25slots (STD) Carrier Maker/Type Pending Carrier Storage Qty. 16 Fork Type/Material 1+4 / Al203 (STD) W/T Wafer I/F speed (U/D) Standard Wafer Loading/Unloading Sequence ED => P => M / M => P => ED Cap Heater Not Use -Boat / Pedestal Qty. of Production Wafers 100 Boat Material Quartz Boat Type 117 slots Ladder (8mm pitch) Boat Rotation Installed Pedestal Type Quartz -Process Tube Outer / Inner Tube Material Quartz / Quartz Inner Type Sjtraight Internal T/C Type Outer Tube interior wall type (for CONV.) Tube Sealing O-ring Seal -Quartzware - General Quartz Maker Requirement None Quartz Provider See Customized Details SiC Maker Requirement None Sic Provider Customer -Fab. Constraint System Controller WAVES Front Operation Panel Installed (OP) Front MMI and Gas Flow Chart MMI & GFC Installed Signal Tower / Colors Installed / 4-Color Signal Tower location(s) See Customized Details General Pressure Display Units Pressure-Mpa / Vac-Torr Gas Cabinet Exhaust Display Units SI (Pa) Furnace Temperature Controller M560A -Vacuum System Vacuum Exhaust System New Type Pump Pending Pump Provided by Customer Pump Power Customer's Facility Provided N2 Gas panel for Pump Provided By Customer Pump-FNC vac Tubing provided by Customer (STD) Vacuum Pressure Controller CKD VEC Vacuum Gage - Pressure Ctrl MKS Capacitance Manometer Vacuum Gage - Press. Monitor(133kpa) MKS Capacitance Manometer Vacuum Gage - Pump Monitor MKS Capacitance Manometer Main valve CKD VEC Trap Not installed -Gas Distribution System Basic Style Integrated Gas system Tubing Stainless steel / Electrical-polish(STD) Tubing Bends No Bend (OP) Tube heating (Include Vacuum Line) Use Manual Valve Fuijkin Air-Operated Valve Fuijkin Filter MYKROLIS Regulator VERIFLO Press. Transducer MYKROLIS Soft Backfill Injector Installed (OP) Manifold Heater Not Use Liquid Source Operation System None Liquid Source Auto-Refill None (STD) Auto-Refill Provided By N/A Auto-Refill Tubing Interconnect By N/AOEMモデルの説明
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.ドキュメント
TEL / TOKYO ELECTRON
ALPHA(α)-303i
検証済み
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
106318
ウェーハサイズ：
不明
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ALPHA(α)-303i
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
106318
ウェーハサイズ：
不明
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available