説明
Vertical LPCVD Furnace構成
Software Version: TS4000 CIM: SECS/GEM Process: POCL3OEMモデルの説明
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other optionsドキュメント
ドキュメントなし
カテゴリ
Furnaces / Diffusion
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
158253
ウェーハサイズ：
不明
ヴィンテージ：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ALPHA-8S
カテゴリ
Furnaces / Diffusion
最終検証： 今日
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
158253
ウェーハサイズ：
不明
ヴィンテージ：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Vertical LPCVD Furnace構成
Software Version: TS4000 CIM: SECS/GEM Process: POCL3OEMモデルの説明
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other optionsドキュメント
ドキュメントなし