説明
Vertical batch thermal processing and diffusion furnace構成
Process Type: Atmospheric; boat SIC (QTY 150) slots Gas: N2/O2/H2/TLC Heater: 1200°C Controller Model: TS4000OEMモデルの説明
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other optionsドキュメント
ドキュメントなし
カテゴリ
Furnaces / Diffusion
最終検証： 3日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Idle
製品ID：
150140
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
ALPHA-8S
カテゴリ
Furnaces / Diffusion
最終検証： 3日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Idle
製品ID：
150140
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Vertical batch thermal processing and diffusion furnace構成
Process Type: Atmospheric; boat SIC (QTY 150) slots Gas: N2/O2/H2/TLC Heater: 1200°C Controller Model: TS4000OEMモデルの説明
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other optionsドキュメント
ドキュメントなし