説明
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 -----> TEOS構成
INDY Plus B M / Indy Plus / I RodOEMモデルの説明
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.ドキュメント
ドキュメントなし
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
103867
ウェーハサイズ：
12"/300mm
Process:
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy B-M ALD LTO520 SiO2----> TEOS
ヴィンテージ：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
TELINDY PLUS
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
103867
ウェーハサイズ：
12"/300mm
Process:
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy B-M ALD LTO520 SiO2----> TEOS
ヴィンテージ：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 -----> TEOS構成
INDY Plus B M / Indy Plus / I RodOEMモデルの説明
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.ドキュメント
ドキュメントなし